Title: Alumina porous membranes obtained by one-step anodizing process in H2SO4 for MEMS Packaging
Authors: Hellin Rico, Raquel ×
Celis, Jean-Pierre
Du Bois, Bert
Van Hoof, Chris
Witvrouw, Ann
Baert, K.
Ruythooren, W. #
Issue Date: 2006
Publisher: Electrochemical Society, Inc
Series Title: Electrochemical Society Transactions - ECS Transactions vol:3 issue:9 pages:75-83
Conference: ECS- Nanostructured Metal Oxides: Processing and Applications location:Cancun, Mexico date:Oct 29- Nov 3 2006
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Department of Materials Engineering - miscellaneous
Chemical and Extractive Metallurgy Section (-)
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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