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Title: Consideration of the chemical-reactivity of trace impurities present in a glow-discharge
Authors: Ohorodnik, Sk ×
De Gendt, Stefan
Tong, Sl
Harrison, Ww #
Issue Date: Jan-1993
Publisher: Royal soc chemistry
Series Title: Journal of analytical atomic spectrometry vol:8 issue:6 pages:859-865
Abstract: Optical and mass spectrometric diagnostics were applied in a study of the chemical reactivity of the plasma impurity species in an r.f. glow discharge source. Copper, Fe and Ta metals and Ta powder-based compacted discs were chosen as test cathodes. A cryogenic coil incorporated within the discharge source was used in the investigations of the potential interactions. Significant increases were observed in the sputtering gas and cathode matrix ion signals, as well as the ground- and excited-state populations of these species with cryogenic cooling. The relative reactivities of the matrix-element species with water-related species in the plasma and the significance for glow discharge-based analytical techniques are discussed
ISSN: 0267-9477
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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