ITEM METADATA RECORD
Title: Robust actuation of silicon MEMS using SMA wires integrated at wafer-level by nickel electroplating
Other Titles: Robust actuation using SMA wires integrated at wafer-level by nickel electroplating
Authors: Clausi, Donato ×
Gradin, Henrik
Braun, Stefan
Peirs, Jan
Stemme, Goran
Reynaerts, Dominiek
van der Wijngaart, Wouter #
Issue Date: Oct-2011
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:189 issue:A pages:108-116
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
× corresponding author
# (joint) last author

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