Journal of Micromechanics and Microengineering vol:21 issue:11
This paper gives an overview of a series of experiments conducted in order to characterize the mechanical behavior of two photo definable epoxies. In particular, it focuses on the stiffness of the materials. The (complex) modulus is measured using five different methods: conventional nanoindentation, continuous stiffness measurement nanoindentation, nanoindentation on MEM structures, dynamic tensile tests and static tensile tests. The measured moduli range from 0.9 GPa to 7.4 GPa for SU-8 and from 1 GPa to 4.1 GPa for Epoclad, depending on the type of experiment and the loading speeds used in the experiments. Results reveal that conventional nanoindentation is not well optimized for polymer characterization and that there is a need for stiffness measurements using more fundamental approaches like a (dynamic) tensile test.