Title: Sub-1nm EOT scaling for high-k/metal-gate stacks
Authors: Heyns, Marc ×
Schram, T.
Ragnarsson, L.A.
De Gendt, Stefan
Kerber, A. #
Issue Date: Jan-2004
Publisher: Pennwell publ co
Series Title: Solid state technology vol:47 issue:7 pages:22-+
ISSN: 0038-111X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
Molecular Design and Synthesis
× corresponding author
# (joint) last author

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