Title: Electrodeposition from a liquid cationic cuprous organic complex for seed layer deposition
Authors: Schaltin, Stijn
Brooks, Neil
Stappers, Linda
D'Urzo, Lucia
Plank, Harald
Kothleitner, Gerald
Gspan, Christian
Binnemans, Koen
Fransaer, Jan # ×
Issue Date: 2011
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:158 issue:11 pages:D647-D650
Abstract: Continuous layers of 20 nm of copper have been deposited on a tantalum substrate from the liquid cationic cuprous organic complex [Cu(MeCN)2][Tf2N]. This type of ionic liquid, with a high concentration of copper(I) ions permits to achieve high nucleation densities. Furthermore, extremely high overpotentials (up to 5.0 V) can be applied without decomposition of the ionic liquid. The deposition of copper has been investigated by cyclic voltammetry (CV), atomic force microscopy (AFM), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The resulting copper deposits can be useful as seed layers for aqueous copper filling.
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
Chemical and Extractive Metallurgy Section (-)
× corresponding author
# (joint) last author

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