Title: Mechanisms for the Trimethylaluminum Reaction in Aluminum Oxide Atomic Layer Deposition on Sulfur Passivated Germanium
Authors: Delabie, Annelies ×
Sioncke, Sonja
Rip, Jens
Van Elshocht, Sven
Caymax, Matty
Pourtois, Geoffrey
Pierloot, Kristine #
Issue Date: Sep-2011
Publisher: American Chemical Society
Series Title: Journal of Physical Chemistry C vol:115 pages:17523-17532
ISSN: 1932-7447
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Quantum Chemistry and Physical Chemistry Section
× corresponding author
# (joint) last author

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