Title: Meeting the future challenges of high-k gate dielectrics and metal gates
Authors: Snoeckx, Koen ×
Deweerd, Wirn
Delabie, Annelies
Van Elshocht, Sven
De Gendt, Stefan #
Issue Date: Jan-2006
Publisher: Canon communications inc
Series Title: Micro vol:24 issue:2 pages:27-33
ISSN: 1081-0595
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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