Title: An in-plane SiGe differential capacitive accelerometer for above-IC integration
Authors: Wen, Lianggong ×
Wouters, Kristof
Haspeslagh, Luc
Witvrouw, Ann
Puers, Robert #
Issue Date: Jul-2011
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:21 issue:7
Article number: 074011
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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