ITEM METADATA RECORD
Title: Growth of high quality InP layers in STI trenches on miscut Si (0 0 1) substrates
Authors: Wang, Gang ×
Leys, M.R.
Nguyen, N.D.
Loo, R.
Brammertz, G.
Richard, O.
Bender, H.
Dekoster, J.
Meuris, M.
Heyns, Marc
Caymax, M. #
Issue Date: Jan-2011
Publisher: North-Holland Pub. Co.
Series Title: Journal of Crystal Growth vol:315 issue:1 pages:32-36
Conference: International Conference on Metalorganic Vapor Phase Epitaxy (ICMOVPE-XV) edition:15 location:Lake Tahoe Hyatt Regency, Incline Village, NV date:23-28 May 2010
Abstract: In this work, we report the selective area epitaxial growth of high quality InP in shallow trench isolation (STI) structures on Si (0 0 1) substrates 6 degrees miscut toward (1 1 1) using a thin Ge buffer layer. We studied the impact of growth rates and steric hindrance effects on the nano-twin formation at the STI side walls. It was found that a too high growth rate induces more nano-twins in the layer and results in InP crystal distortion. The STI side wall tapering angle and the substrate miscut angle induced streric hindrance between the InP facets and the STI side walls also contribute to defect formation. In the [(1) over bar1 0] orientated trenches, when the STI side wall tapering angle is larger than 10 degrees, crystal distortion was observed while the substrate miscut angle has no significant impact on the InP defect formation. In the [(1) over bar1 0] trenches, both the increased STI tapering angle and the substrate miscut angle induce high density of defects. With a small STI tapering angle and a thin Ge layer, we obtained extended defect free InP in the top region of the [1 1 0] trenches with aspect ratio larger than 2. (C) 2010 Elsevier B.V. All rights reserved.
URI: 
ISSN: 0022-0248
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:
File Description Status SizeFormat
pub05690.pdfMain article Published 796KbAdobe PDFView/Open Request a copy

These files are only available to some KU Leuven Association staff members

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science