Title: Molecular beam epitaxial growth of BaTiO3 single crystal on Ge-on-Si(001) substrates
Authors: Merckling, C ×
Saint-Girons, G
Botella, C
Hollinger, G
Heyns, Marc
Dekoster, J
Caymax, M #
Issue Date: Feb-2011
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:98 issue:9 pages:-
Article number: 092901
Abstract: Thin films of perovskite type BaTiO3 (BTO) oxide have been grown epitaxially directly on Ge(001) surface at high temperature using molecular beam epitaxy. A stable (2 x 1) BaGex surface periodicity is the critical enabling template for subsequent BTO heteroepitaxy on Ge(001). Reflection high energy electron diffraction (RHEED) and transmission electron microscopy indicate that high quality heteroepitaxy on Ge-on-Si(001) take place with < 100 > BTO(001)parallel to < 110 > Ge(001) confirming a 45 degrees rotation epitaxial relationship. X-ray diffraction has been used to study the BTO lattice parameters and we evidenced that both tetragonal and cubic phases of BTO are present in the epilayer. (C) 2011 American Institute of Physics. [doi:10.1063/1.3558997]
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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