Title: Air gap-based MEMS switch technology using nickel surface micromachining
Authors: Ekkels, P. ×
Rottenberg, X.
Czarnecki, P.
Philipsen, H.
Mertens, Robert Pierre
Puers, Bob
Tilmans, H.A.C. #
Issue Date: Apr-2011
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:166 issue:2 pages:256-263
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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