Title: Yields of the plasma oxidation of silicon by neutral oxygen-atoms and negative oxygen atom ions
Authors: Vinckier, Christiaan ×
Dejaegere, S #
Issue Date: Jan-1990
Publisher: Electrochemical soc inc
Series Title: Journal of the electrochemical society vol:137 issue:2 pages:628-631
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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