Ultra clean processing of silicon surfaces 2000 vol:76-77 pages:211-214
The ozone decomposition rate in ultrapure water and the ozone solubility therein were investigated as a function of temperature, pH and nature of the additive used. The ozone decay rate is low (< 5.7 10(-5) s(-1)) at low pH except when HCl is used. Higher temperatures lead to higher ozone decay rates. The ozone solubility is temperature dependent: less ozone can be dissolved at higher temperature at a constant partial pressure in the gas phase. The solubility evolves towards a maximum at low pH except when HCl is present.