Title: The ozone solubility and its decay in aqueous solutions: Crucial issues in ozonated chemistries for semiconductor cleaning
Authors: De Smedt, Frank ×
De Gendt, Stefan
Heyns, MM
Vinckier, Christiaan #
Issue Date: Jan-2001
Publisher: Scitec publications ltd
Series Title: Ultra clean processing of silicon surfaces 2000 vol:76-77 pages:211-214
Abstract: The ozone decomposition rate in ultrapure water and the ozone solubility therein were investigated as a function of temperature, pH and nature of the additive used. The ozone decay rate is low (< 5.7 10(-5) s(-1)) at low pH except when HCl is used. Higher temperatures lead to higher ozone decay rates. The ozone solubility is temperature dependent: less ozone can be dissolved at higher temperature at a constant partial pressure in the gas phase. The solubility evolves towards a maximum at low pH except when HCl is present.
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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