Title: Atom probe for FinFET dopant characterization
Authors: Kambham, Ajay Kumar
Mody, Jay
Gilbert, Matthieu
Koelling, Sebastian
Vandervorst, Wilfried #
Issue Date: 2010
Conference: 52nd International Field Emission Symposium - IFES location:Sydney Australia date:5-jul-2010
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Nuclear and Radiation Physics Section
Theoretical Physics Section
# (joint) last author

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