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Title: Non-linear dielectric constant increase with Ti composition in high-k ALD-HfTiOx films after O2 crystallization annealing
Authors: Tomida, Kazuyuki ×
Popovici, Mihaela Ioana
Opsomer, Karl
Menou, Nicolas
Wang, Wan-Chih
Delabie, Annelies
Swerts, Johan
Steenbergen, Johnny
Kaczer, Ben
Van Elshocht, Sven
Detavernier, Christophe
Afanas'ev, Valeri
Wouters, Dirk
Kittl, Jorge #
Issue Date: 2010
Publisher: IOP
Host Document: IOP Conference Series: Materials Science and Engineering vol:8 issue:1 pages:12023
ISSN: 1757-8981
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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