10th International Conference on Atomic Layer Deposition, Date: 2010/06/20 - 2010/06/20, Location: Seoul Korea
Publication date:
2010-01-01
Pages:
80 -
Proceedings of the 10th International Conference on Atomic Layer Deposition
Author:
Loozen, Xavier
O'Sullivan, Barry ; Rothschild, Aude ; Vermang, Bart ; John, Joachim ; Poortmans, Jef