Title: Investigation of bias-temperature instability in work-function-tuned high-k/metal-gate stacks
Authors: Kaczer, Ben ×
Veloso, Anabela
Roussel, Philippe
Grasser, T
Groeseneken, Guido #
Issue Date: 2009
Publisher: American Vacuum Society (AVS)
Series Title: Journal of Vacuum Science and Technology B vol:27 issue:1 pages:459-462
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science