ITEM METADATA RECORD
Title: Investigation of bias-temperature instability in work-function-tuned high-k/metal-gate stacks
Authors: Kaczer, Ben ×
Veloso, Anabela
Roussel, Philippe
Grasser, T
Groeseneken, Guido #
Issue Date: 2009
Publisher: American Vacuum Society (AVS)
Series Title: Journal of Vacuum Science and Technology B vol:27 issue:1 pages:459-462
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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