Title: Analysis of pocket profile deactivation and its impact on Vth variation for laser annealed device using an atomistic kinetic Monte Carlo approach
Authors: Noda, Taichi
Vandervorst, Wilfried
Vrancken, Christa
Ortolland, Claude
Rosseel, Erik
Absil, Philippe
Biesemans, Serge
Hoffmann, Thomas Y #
Issue Date: 2010
Host Document: Proceedings of the IEEE International Electron Devices Meeting - IEDM pages:383-386
Conference: IEEE International Electron Devices Meeting - IEDM location:San Francisco, CA USA date:6-dec-2010
ISBN: 978-1-4244-7419-6
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science