Title: Resist roughness evaluation and frequency analysis: metrological challenges and potential solutions for extreme ultraviolet lithography
Authors: Vaglio Pret, Alessandro ×
Gronheid, Roel
Ishimoto, Toru
Sekiguchi, Kohei #
Issue Date: Oct-2010
Publisher: SPIE - International Society for Optical Engineering
Series Title: Journal of Micro/Nanolithography, MEMS, and MOEMS vol:9 issue:4
Article number: 41308
ISSN: 1932-5150
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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