Title: Analysis and characterization of a mechanical sensor to monitor stress in interconnect features
Authors: Wilson, Chris ×
Croes, Kristof
Tokei, Zsolt
Beyer, Gerald
Gallacher, Barry
Bull, Steve
Horsfall, Alton
O'Neill, Anthony #
Issue Date: Oct-2010
Publisher: Elsevier
Series Title: Thin Solid Films vol:519 issue:1 pages:443-449
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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