Title: A water-tight packaging of MEMS electrostatic actuators for biomedical applications
Authors: Erismis, Mehmet Akif
Pereira Neves, Hercules
De Moor, Piet
Puers, Bob
Van Hoof, Chris #
Issue Date: 2010
Publisher: Springer
Series Title: Microsystem Technologies vol:16 issue:12 pages:2109-2113
ISSN: 0946-7076
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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