Title: Three litho-process-litho approaches for 2D double patterning at the 32nm half pitch node
Authors: Wong, Patrick
Gronheid, Roel
Wiaux, Vincent
Vaglio Pret, Alessandro
Verhaegen, Staf
Vandenbroeck, Nadia #
Issue Date: 2010
Publisher: Technical Association of Photo
Series Title: Journal of Photopolymer Science and Technology vol:23 issue:2 pages:185-192
ISSN: 0914-9244
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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