Title: Physical Loss Mechanisms for resonant acoustical waves in Boron doped poly-SiGe deposited with Hydrogen dilution
Authors: Stoffels, Steve ×
Autizi, Enrico
Van Hoof, Rita
Severi, Simone
Puers, Bob
Witvrouw, Ann
Tilmans, Harrie #
Issue Date: Oct-2010
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:108 issue:8
Article number: 84517
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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