Title: Optimization of external poly base sheet resistance in 0.13um quasi self-aligned SiGe:C HBTs
Authors: You, Shuzhen
Van Huylenbroeck, Stefaan
Nguyen, Duy
Sibaja-Hernandez, Arturo
Venegas, Rafael
Van Wichelen, Koen
Decoutere, Stefaan
De Meyer, Kristin #
Issue Date: 2010
Publisher: Elsevier
Series Title: Thin Solid Films vol:518 issue:6, Suppl. 1 pages:S68-S71
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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