Title: Using ellipsometry for assessment of TiN surface roughness after plasma etch
Authors: Shamiryan, Denis ×
Paraschiv, Vasile
Dictus, Dries
Baklanov, Mikhail
Beckx, Stephan
Boullart, Werner #
Issue Date: 2008
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:155 issue:2 pages:H108-H112
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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