Title: Enhanced resolution of poly(methyl methacrylate) electron resist by thermal processing
Authors: Arjmandi, Nima ×
Lagae, Liesbet
Borghs, Gustaaf #
Issue Date: Jul-2009
Publisher: American Vacuum Society (AVS)
Series Title: Journal of Vacuum Science and Technology B vol:27 issue:4 pages:1915-1918
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
Solid State Physics and Magnetism Section
× corresponding author
# (joint) last author

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