Title: Screening self-assembled monolayers as Cu diffusion barriers
Authors: Maestre Caro, Arantxa ×
Maes, Guido
Borghs, Gustaaf
Whelan, Caroline #
Issue Date: Oct-2008
Publisher: Elsevier
Series Title: Microelectronic Engineering vol:85 issue:10 pages:2047-2050
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Quantum Chemistry and Physical Chemistry Section
Semiconductor Physics Section
× corresponding author
# (joint) last author

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