ITEM METADATA RECORD
Title: CMOS compatible anodization process for low cost high density capacitors
Authors: Detalle, Mikael
Rakowski, Michal
Potoms, Goedele
Mercha, Abdelkarim
de Potter de ten Broeck, Muriel
Phommahaxay, Alain
Sabuncuoglu Tezcan, Deniz
Soussan, Philippe #
Issue Date: 2010
Host Document: Processing, Materials, and Integration of Damascene and 3D Interconnects pages:107-115
Conference: Processing, Materials, and Integration of Damascene and 3D Interconnects location:Las Vegas, NV USA date:10-okt-2010
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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