Title: Electron energy dependence of defect generation in high-k gate stacks
Authors: O'Connor, Robert ×
Pantisano, Luigi
Degraeve, Robin
Kauerauf, Thomas
Kaczer, Ben
Roussel, Philippe
Groeseneken, Guido #
Issue Date: Mar-2008
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:103 issue:6
Article number: 64503
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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