|ITEM METADATA RECORD
|Title: ||A novel test structure to study intrinsic reliability of barrier/low-k|
|Authors: ||Zhao, Larry|
Gianni, Giai Gischia
Beyer, Gerald #
|Issue Date: ||2009 |
|Host Document: ||Proceedings of the 47th Annual IEEE International Reliability Physics Symposium - IRPS vol:1-2 pages:848-850|
|Conference: ||47th Annual IEEE International Reliability Physics Symposium - IRPS location:Montreal Canada date:26-apr-2009|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
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