ITEM METADATA RECORD
Title: A novel test structure to study intrinsic reliability of barrier/low-k
Authors: Zhao, Larry
Tokei, Zsolt
Gianni, Giai Gischia
Pantouvaki, Marianna
Croes, Kristof
Beyer, Gerald #
Issue Date: 2009
Host Document: Proceedings of the 47th Annual IEEE International Reliability Physics Symposium - IRPS vol:1-2 pages:848-850
Conference: 47th Annual IEEE International Reliability Physics Symposium - IRPS location:Montreal Canada date:26-apr-2009
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
# (joint) last author

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