Title: Characteristics of copper electrodeposits on featureless substrates and in microvias with aspect ratio up to 10
Authors: Luhn, Ole
Radisic, Alex
Vereecken, Philippe
Van Hoof, Chris
Ruythooren, Wouter
Celis, Jean-Pierre
Issue Date: 2009
Host Document: Proceedings of the 215th Electrochemical Society Spring Meeting pages:997
Conference: Electrochemical Society Spring Meeting edition:215 location:San Fransisco, CA, USA date:24 May 2009
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Centre for Surface Chemistry and Catalysis
Associated Section of ESAT - INSYS, Integrated Systems
Surface and Interface Engineered Materials

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