Title: Stress analysis and junction leakage of sub-melt laser annealed SiGe epitacial layers
Authors: Bargallo Gonzalez, Mireia ×
Rosseel, Erik
Hikavyy, Andriy
Fernandez Lanas, Tatiana
Eneman, Geert
Verheyen, Peter
Loo, Roger
Simoen, Eddy
Claeys, Cor #
Issue Date: Nov-2010
Publisher: IEEE
Series Title: IEEE Transactions on Semiconductor Manufacturing vol:23 issue:4 pages:538-544
ISSN: 0894-6507
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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