Title: Application of a nano-mechanical sensor to monitor stress in copper damascene interconnects
Authors: Wilson, Chris ×
Croes, Kristof
Tokei, Zsolt
Vereecke, Bart
Beyer, Gerald
O'Neill, A.G
Horsfall, A.B #
Issue Date: Sep-2009
Publisher: Institute of Pure and Applied
Series Title: Applied Physics Express vol:2 issue:9
Article number: 96503
ISSN: 1882-0778
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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