Title: Selective epitaxial growth of InP in STI trenches on off-axis Si(001) substrates
Authors: Wang, Gang
Nguyen, Duy
Leys, Maarten
Loo, Roger
Richard, Olivier
Brammertz, Guy
Meuris, Marc
Heyns, Marc
Caymax, Matty #
Issue Date: 2010
Host Document: Proceedings of the China Semiconductor Technology International Conference - CSTIC pages:959-964
Conference: China Semiconductor Technology International Conference - CSTIC location:Shanghai China date:18-mrt-2010
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Department of Materials Engineering - miscellaneous
# (joint) last author

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