|ITEM METADATA RECORD
|Title: ||Selective epitaxial growth of InP in STI trenches on off-axis Si(001) substrates|
|Authors: ||Wang, Gang|
Caymax, Matty #
|Issue Date: ||2010 |
|Host Document: ||Proceedings of the China Semiconductor Technology International Conference - CSTIC pages:959-964|
|Conference: ||China Semiconductor Technology International Conference - CSTIC location:Shanghai China date:18-mrt-2010|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Department of Materials Engineering - miscellaneous|
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