Title: AlGaN-on-Si backside illuminated photodetectors for the extreme ultraviolet (EUV) range
Authors: Malinowski, Pawel
Duboz, Jean-Yves
John, Joachim
Sturdevant, Charles
Das, Jo
Derluyn, Joff
Germain, Marianne
De Moor, Piet
Minoglou, Kiki
Semond, Fabrice
Frayssinet, Eric
Hochedez, Jean-Francois
Giordanengo, Boris
Van Hoof, Chris
Mertens, Robert #
Issue Date: 2010
Host Document: Optical Sensing and Detection pages:772617
Conference: Optical Sensing and Detection location:Brussels Belgium date:12-apr-2010
ISBN: 978-0-8194-8199-3
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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