Title: A novel gap narrowing process for creating high aspect ratio transduction gaps for MEM HF resonators
Authors: Stoffels, Steve
Bryce, George
Van Hoof, Rita
Du Bois, Bert
Mertens, Robert
Puers, Bob
Tilmans, Harrie
Witvrouw, Ann # ×
Issue Date: 2009
Publisher: MRS
Host Document: MRS Proceedings vol:1139
Series Title: Materials Research Society Symposium Proceedings
Conference: Microelectromechanical Systems‚ - Materials and Devices II location:Boston, MA USA date:Dec 1-5 2008
Article number: 1139-GG01-05
ISBN: 978-1-60511-111-7
ISSN: 0272-9172
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science