|ITEM METADATA RECORD
|Title: ||Effects of interfacial strength and dimension of structures on physical cleaning window|
|Authors: ||Kim, Tae-Gon|
De Gendt, Stefan
Heyns, Marc #
|Issue Date: ||2010 |
|Host Document: ||Proceedings of the 10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS pages:10-11|
|Conference: ||10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS location:Oostende Belgium date:19-okt-2010|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Department of Materials Engineering - miscellaneous|
Molecular Design and Synthesis
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