ITEM METADATA RECORD
Title: Effects of interfacial strength and dimension of structures on physical cleaning window
Authors: Kim, Tae-Gon
Pacco, Antoine
Wostyn, Kurt
Xu, XiuMei
Struyf, Herbert
Arstila, Kai
Park, Jin-Goo
De Gendt, Stefan
Mertens, Paul
Heyns, Marc #
Issue Date: 2010
Host Document: Proceedings of the 10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS pages:10-11
Conference: 10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS location:Oostende Belgium date:19-okt-2010
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Department of Materials Engineering - miscellaneous
Molecular Design and Synthesis
# (joint) last author

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