Title: Evaluation of post ion-implantation resist strip with the background signal of a light scattering tool
Authors: Halder, Sandip ×
Vos, Rita
Wada, Masayuki
Tsvetanova, Diana
Claes, Martine
Mertens, Paul
Radovanovic, Sanda
Dighe, Prasanna
Amann, Christophe
Simpson, Gavin
Polli, Marco #
Issue Date: May-2010
Publisher: Institute of Pure and Applied
Series Title: Japanese Journal of Applied Physics vol:49 issue:5
Article number: 56504
ISSN: 0021-4922
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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