Title: Understanding the potential and limitations of the HfAlO as interpoly dielectric in floating gate flash memory
Authors: Govoreanu, Bogdan ×
Degraeve, Robin
Zahid, Mohammed
Nyns, Laura
Cho, Moon Ju
Kaczer, Ben
Jurczak, Malgorzata
Kittl, Jorge
Groeseneken, Guido #
Issue Date: Jul-2009
Publisher: Elsevier
Series Title: Microelectronic Engineering vol:86 issue:7-9 pages:1807-1811
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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