ITEM METADATA RECORD
Title: SILC defect generation spectroscopy in HfSiON using constant voltage stress and substrate hot electron injection
Authors: O'Connor, Robert
Pantisano, Luigi
Degraeve, Robin
Kauerauf, Thomas
Kaczer, Ben
Roussel, Philippe
Groeseneken, Guido #
Issue Date: 2008
Host Document: IEEE International Reliability Physics Symposium Proceedings - IRPS pages:324-329
Conference: IEEE International Reliability Physics Symposium Proceedings - IRPS location:Phoenix, AZ USA date:27-apr-2008
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
# (joint) last author

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