Title: In situ X-ray diffraction study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/low-k damascene interconnects using synchrotron radiation
Authors: Wilson, Chris ×
Volders, Henny
Croes, Kristof
Pantouvaki, Marianna
Beyer, Gerald
Horsfall, Alton B
O'Neill, Anthony G
Tokei, Zsolt #
Issue Date: Mar-2010
Publisher: Elsevier
Series Title: Microelectronic Engineering vol:87 issue:3 pages:398-401
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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