Title: Polysilicon MEMS accelerometers exposed to shocks: numerical-experimental investigation
Authors: Ghisi, Aldo ×
Kalicinski, Stanislaw
Mariani, Stefano
De Wolf, Ingrid
Corigliano, Alberto #
Issue Date: Mar-2009
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:19 issue:3
Article number: 35023
Abstract: This paper discusses the effect of shocks (drop test) on polysilicon MEMS accelerometers. Experiments are performed where the shoch amplitude is measured in-situ. The results are compared to numerical investigations.
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science