Polysilicon MEMS accelerometers exposed to shocks: numerical-experimental investigation
Ghisi, Aldo × Kalicinski, Stanislaw Mariani, Stefano De Wolf, Ingrid Corigliano, Alberto #
IOP Publishing Ltd.
Journal of Micromechanics and Microengineering vol:19 issue:3
This paper discusses the effect of shocks (drop test) on polysilicon MEMS accelerometers. Experiments are performed where the shoch amplitude is measured in-situ. The results are compared to numerical investigations.