ITEM METADATA RECORD
Title: Solid phase epitaxy of amorphous Ge films deposited by PECVD
Authors: Ma, Quanbao
Lieten, Ruben
Degroote, Stefan
Leys, Maarten
Germain, Marianne
Borghs, Gustaaf #
Issue Date: 2010
Conference: 18th International Vacuum Congress - IVC location:Beijing China date:23-aug-2010
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Semiconductor Physics Section
# (joint) last author

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