|ITEM METADATA RECORD
|Title: ||Solid phase epitaxy of amorphous Ge films deposited by PECVD|
|Authors: ||Ma, Quanbao|
Borghs, Gustaaf #
|Issue Date: ||2010 |
|Conference: ||18th International Vacuum Congress - IVC location:Beijing China date:23-aug-2010|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Semiconductor Physics Section|
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