Title: Shaping the future of nanoelectronics beyond the Si roadmap with new materials and devices
Authors: Heyns, Marc
Bellenger, Florence
Brammertz, Guy
Caymax, Matty
Cantoro, Mirco
De Gendt, Stefan
De Jaeger, Brice
Delabie, Annelies
Eneman, Geert
Groeseneken, Guido
Hellings, Geert
Houssa, Michel
Iacopi, Francesca
Leonelli, Daniele
Lin, Dennis
Magnus, Wim
Martens, Koen
Merckling, Clement
Meuris, Marc
Mitard, Jerome
Penaud, Julien
Pourtois, Geoffrey
Scarrozza, Marco
Simoen, Eddy
Soree, Bart
Van Elshocht, Sven
Vandenberghe, William
Vandooren, Anne
Vereecken, Philippe
Verhulst, Anne
Wang, Wei-E #
Issue Date: 2010
Host Document: Proceedings of Optical Microlithography XXIII pages:764003
Conference: Optical Microlithography XXIII location:San Jose, CA USA date:21-feb-2010
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
Molecular Design and Synthesis
Semiconductor Physics Section
Department of Materials Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
Centre for Surface Chemistry and Catalysis
# (joint) last author

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