Title: Dominant layer for stress-induced positive charges in Hf-based gate stacks
Authors: Zhang, Jian F ×
Chang, M.H
Ji, Z
Lin, L
Ferain, Isabelle
Groeseneken, Guido
Pantisano, Luigi
De Gendt, Stefan
Heyns, Marc #
Issue Date: Dec-2008
Publisher: IEEE
Series Title: IEEE Electron Device Letters vol:29 issue:12 pages:1360-1363
ISSN: 0741-3106
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Molecular Design and Synthesis
× corresponding author
# (joint) last author

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