Title: Air-gap formation by UV-assisted decomposition of CVD material
Authors: Pantouvaki, Marianna
Humbert, Aurelie
Van Besien, Els
Camerotto, Elisabeth
Travaly, Youssef
Richard, Olivier
Willegems, Myriam
Volders, Henny
Kellens, Kristof
Daamen, Roel
Hoofman, Romano
Beyer, Gerald #
Issue Date: 2008
Publisher: Elsevier
Series Title: Microelectronic Engineering vol:85 issue:10 pages:2071-2074
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
# (joint) last author

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