Title: Study of silicon-silicon nitride interface properties on planar (100), planar (111) and textured surfaces using deep-level transient spectroscopy
Authors: Gong, Chun ×
Simoen, Eddy
Posthuma, Niels
Van Kerschaver, Emmanuel
Poortmans, Jef
Mertens, Robert #
Issue Date: 2010
Publisher: Institute of Physics and IOP Publishing
Series Title: Journal of Physics D, Applied Physics vol:43 issue:48 pages:485301
Article number: 485301
ISSN: 0022-3727
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - ELECTA, Electrical Energy Computer Architectures
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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