Title: Probing doping conformality in fin shaped field effect transistor structures using resistors
Authors: Vandervorst, Wilfried ×
Jurczak, Malgorzata
Everaert, Jean-Luc
Pawlak, B.J
Duffy, Ray
Del-Agua-Bomiquel, J.I
Poon, T #
Issue Date: 2008
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:26 issue:1 pages:396-401
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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