ITEM METADATA RECORD
Title: Roughness characterization in the frequency domain and LWR mitigation with post-litho processes
Authors: Vaglio Pret, Alessandro ×
Gronheid, Roel
Foubert, Philippe #
Issue Date: 2010
Host Document: Advances in Resist Materials and Processing Technology XXVII pages:763930
Conference: Advances in Resist Materials and Processing Technology XXVII location:San Jose, CA USA date:21-feb-2010
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science